Publication detail

Assessment of non_uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry

NEČAS, D. OHLÍDAL, I. FRANTA, D. ČUDEK, V. OHLÍDAL, M. VODÁK, J. SLÁDKOVÁ, L. ZAJÍČKOVÁ, L. ELIÁŠ, M. VIŽĎA, F.

English title

Assessment of non_uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry

Type

WoS Article

Language

en

Original abstract

Standard variable-angle spectroscopic ellipsometry, mapping spectroscopic ellipsometry with microspot and imaging spectroscopic reflectometry are applied to optical characterisation of a thin SiOxCyHz film considerably non-uniform in thickness and which is also suspected of non-uniformity also in the optical constants. It is shown that using the combination of these three optical methods, enables us to determine the spectral dependencies of the optical constants of the film together with parameters characterising the shape of thickness non-uniformity and fine map of local thickness. The mapping spectroscopic ellipsometry with microspot enables deciding whether the film is non-uniform in optical constants. For the thin film studied it is found that the non-uniformity in optical constants is under experimental accuracy. The consistency of results obtained using individual techniques is checked and the advantages and disadvantages of the techniques are discussed.

Keywords in English

Variable-angle spectroscopic ellipsometry, Mapping spectroscopic ellipsometry, Imaging spectroscopic reflectometry, Non-uniform thin films

Released

2014-11-28

Publisher

Elsevier B.V.

ISSN

0040-6090

Journal

Thin Solid Films

Volume

571

Number

3

Pages from–to

573–578

Pages count

6

BIBTEX


@article{BUT109003,
  author="David {Nečas} and Ivan {Ohlídal} and Daniel {Franta} and Vladimír {Čudek} and Miloslav {Ohlídal} and Jiří {Vodák} and Lucia {Sládková} and Lenka {Zajíčková} and Marek {Eliáš} and František {Vižďa}",
  title="Assessment of non_uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry",
  journal="Thin Solid Films",
  year="2014",
  volume="571",
  number="3",
  pages="573--578",
  doi="10.1016/j.tsf.2013.12.036",
  issn="0040-6090"
}