Publication detail

Deposition and in situ characterization of ultra-thin films

VOBORNÝ, S. KOLÍBAL, M. MACH, J. ČECHAL, J. BÁBOR, P. PRŮŠA, S. SPOUSTA, J. ŠIKOLA, T.

English title

Deposition and in situ characterization of ultra-thin films

Type

Paper in proceedings (conference paper)

Language

en

Original abstract

Deposition of ultra-thin GaN layers and their analysis using XPS, SIMS, TOF-LEIS.

Released

2003-06-23

Publisher

EVC

Location

Berlin

Book

EVC'03 Abstracts

Pages from–to

45–

Pages count

2

BIBTEX


@inproceedings{BUT11053,
  author="Stanislav {Voborný} and Miroslav {Kolíbal} and Jindřich {Mach} and Jan {Čechal} and Petr {Bábor} and Stanislav {Průša} and Jiří {Spousta} and Tomáš {Šikola}",
  title="Deposition and in situ characterization of ultra-thin films",
  booktitle="EVC'03 Abstracts",
  year="2003",
  pages="2",
  publisher="EVC",
  address="Berlin"
}