Publication detail

Electron beam lithography of graphene Hall-bar for micro-contacting

HRABOVSKÝ, M.

English title

Electron beam lithography of graphene Hall-bar for micro-contacting

Type

Conference proceedings

Language

en

Original abstract

Overview of the preperation and shaping of graphene into Hall-bar like structures for nanosensoric applications.

Keywords in English

Grapehen, Hall-bar, EBL, plasma etching, HSQ, PMMA

Released

2015-04-23

Publisher

MUNI PRESS

Location

Brno

ISBN

978-80-210-7825-3

Book

Ceitec PHD Retreat

Pages from–to

95–95

Pages count

1

BIBTEX


@proceedings{BUT115736,
  editor="Miloš {Hrabovský}",
  title="Electron beam lithography of graphene Hall-bar for micro-contacting",
  year="2015",
  series="1.",
  number="1",
  pages="95--95",
  publisher="MUNI PRESS",
  address="Brno",
  isbn="978-80-210-7825-3"
}