Imaging spectroscopic reflectometer based on pellicle beamsplitter

Paper in proceedings (conference paper)

en

Imaging spectroscopic reflectometry is a technique suitable for measurements of local optical parameters (thickness, refraction index and index of extinction) of non-uniform thin films along their surface. It is usually assumed that gradients of these non-uniformities are reasonably small. A new design of an imaging spectroscopic reflectometer provides the possibility to successfully measure high gradient non-uniformities along relatively large area of a thin film surface. A specialized low cost apparatus was developed to accomplish a higher resolution of surface imaging at the cost of reduction of the spectral range usable. The whole concept of the imaging spectroscopic reflectometer was designed to achieve high light throughput using only prefabricated optical components. Shorter measurement times and lower demands on an imaging camera used were achieved. The imaging spectroscopic reflectometer mentioned above was realized as a compact device with easy calibration and handling. Any monochromator with its output into an optical fiber can be used as a source of light. The potential of the device is demonstrated using samples with high gradients of thickness along their surfaces. A significant improvement in the resolution of thin film interference pattern images was observed in comparison with the same images obtained by means of an older UV-VIS-NIR device.

Imaging spectroscopic reflectometry, pellicle beam splitter,

2015-09-23

9781628418156

0277-786X

Optical Systems Design 2015: Optical Design and Engineering VI

Proceedings of SPIE

9626

2L-1–2L-8

8