Publication detail
Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution
VODÁK, J. NEČAS, D. OHLÍDAL, M. OHLÍDAL, I.
English title
Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution
Type
WoS Article
Language
en
Original abstract
In this paper an imaging spectroscopic reflectometer with enhanced spatial resolution is presented. Main features of its design, experimental data acquisition, i.e. maps of thin film spectral dependencies of local reflectance and the local thickness map determination are described. The ability of this instrument to characterize thin film thickness non-uniformity with high gradients is demonstrated on measurements of thin film edges. A comparison with an older device is also presented.
Keywords in English
enhanced spatial resolution, high gradient thickness distribution, imaging spectroscopic reflectometer, non-uniform thin films
Released
2017-01-12
Publisher
IOP Publishing
ISSN
0957-0233
Journal
Measurement Science and Technology
Volume
28
Number
2
Pages from–to
025205–025205-6
Pages count
6