Publication detail
Optical measurement of mechanical stresses in diamond-like carbon films
OHLÍDAL, I. FRANTA, D. ČUDEK, V. BURŠÍKOVÁ, V. KLAPETEK, P. JÁKL, M.
English title
Optical measurement of mechanical stresses in diamond-like carbon films
Type
Paper in proceedings (conference paper)
Language
en
Original abstract
In this paper the mechanical stresses taking place in diamond thin films prepared by the plasma enhanced chemical vapor deposition onto silicon single crystal substrates are studied. For determination of the stress values the Stoneys formula is used. The values of the film thickness are determined using the combined method of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The values of the curvature radii of the deformed silicon substrates in consequence of the film stresses are evaluated using interferometric method based on two-beam interferometry and chromatic aberration method. The dependence of the mechanical stress inside these films on their thickness values is determined. It is found that this dependence can be approximate by the straigth line. The results achieved for the mechanical stresses obtainedby both the optical methods, i.e. by the interferometric and chromatic aberration method, are compared. It is shown that within the experimental accuracy the stress values determined using using both these methods are identical.
Keywords in English
DLC films, mechanical stress, two-beam interferometry, chromatic aberration method
Released
2005-02-14
Publisher
Society of Photo-Optical Instrumentation Engineers (SPIE)
Location
Bellingham, Washington
ISBN
0-8194-5757-4
ISSN
0277-786X
Book
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
Journal
Proceedings of SPIE
Volume
5776
Number
2
Pages from–to
717–728
Pages count
12
BIBTEX
@inproceedings{BUT17226,
author="Ivan {Ohlídal} and Daniel {Franta} and Miloslav {Ohlídal} and Vladimír {Čudek} and Petr {Klapetek} and Vilma {Buršíková} and Miloš {Jákl}",
title="Optical measurement of mechanical stresses in diamond-like carbon films",
booktitle="PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)",
year="2005",
journal="Proceedings of SPIE",
volume="5776",
number="2",
pages="717--728",
publisher="Society of Photo-Optical Instrumentation Engineers (SPIE)",
address="Bellingham, Washington",
isbn="0-8194-5757-4",
issn="0277-786X"
}