Publication detail
The collection efficiency of the Everhart-Thornley detector of secondary electrons in SEM.
KONVALINA, I. MÜLLEROVÁ, I. FRANK, L.
English title
The collection efficiency of the Everhart-Thornley detector of secondary electrons in SEM.
Type
Paper in proceedings (conference paper)
Language
en
Original abstract
The Everhart-Thornley (ET) type detector is widely used in SEM for the collection of secondary electrons (SE). At first glance the electrostatic field of the front grid, biased to a positive potential of several hundred volts, might be thought to attract all SE of a kinetic energy below 50 eV or at least near the SE spectrum peak at 1 – 3 eV. However, the detection quantum efficiency (DQE) of such detectors has been found to be significantly lower than one. The DQE depends heavily on the collection efficiency (CE), i.e. the proportion of emitted species that impact on the detector. Preliminary simulations of electron trajectories indicated CE values for the ET detector even below 10 % for small working distances and more detailed results are reported here.
Keywords in English
scanning electron microscope, collection efficiency, secondary electrons
Released
2004-08-22
Location
Antwerpy
Book
EMC 2004 – Proceedings of the 13th European Microscopy Congress
Pages from–to
79–
Pages count
2
BIBTEX
@inproceedings{BUT21737,
author="Ivo {Konvalina} and Ilona {Müllerová} and Luděk {Frank}",
title="The collection efficiency of the Everhart-Thornley detector of secondary electrons in SEM.",
booktitle="EMC 2004 - Proceedings of the 13th European Microscopy Congress",
year="2004",
pages="2",
address="Antwerpy"
}