Publication detail

Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films

KADLEC, J. JELÍNEK, M. KOCOUREK, T. DVOŘÁK, M. JOSKA, Z.

English title

Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films

Type

Paper in proceedings (conference paper)

Language

en

Original abstract

Hybrid laser-magnetron deposition systéme was developed and tested for study carbon based thin films. Films were fabricated in argon (TiC) and in argon/nitrogen (TiCN). Crystaline films were grown at room substrate temperature. Film properties were studied by SEM, XRD, XPS and GDOES

Keywords in English

Hybrid deposicion, structure properties, TiC-TiCN films

Released

2008-06-30

Publisher

Brno University of Technology

Location

Brno

ISBN

978-80-214-3659-6

Book

9th ABA

Pages from–to

32–36

Pages count

5

BIBTEX


@inproceedings{BUT32392,
  author="Jaromír {Kadlec} and Miroslav {Jelínek} and Tomáš {Kocourek} and Milan {Dvořák} and Zdeněk {Joska}",
  title="Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films",
  booktitle="9th ABA",
  year="2008",
  series="1",
  number="1",
  pages="32--36",
  publisher="Brno University of Technology",
  address="Brno",
  isbn="978-80-214-3659-6"
}