Publication detail
Control of defects and gettering in Czochralski silicon
ŠIK, J. LORENC, M. VÁLEK, L.
English title
Control of defects and gettering in Czochralski silicon
Type
Paper in proceedings (conference paper)
Language
en
Released
2004-09-01
ISBN
80-7345-032-1
BIBTEX
@inproceedings{BUT35644,
author="Jan {Šik} and Michal {Lorenc} and Lukáš {Válek}",
title="Control of defects and gettering in Czochralski silicon",
year="2004",
isbn="80-7345-032-1"
}