Publication detail
Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams
LOPOUR, F. ŠIKOLA, T. SPOUSTA, J. DITTRICHOVÁ, L. BÁBOR, P. DUARTE, J. MATĚJKA, F.
English title
Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams
Type
Paper in proceedings (conference paper)
Language
en
Original abstract
Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams
Released
2000-04-19
Publisher
Editors: B. Michel, T. Winkler, M. Werner,H. Fecht
Location
Berlin
Book
MicroMat 2000
Pages from–to
919–
Pages count
4
BIBTEX
@inproceedings{BUT4036,
author="Filip {Lopour} and Tomáš {Šikola} and Jiří {Spousta} and Libuše {Dittrichová} and Petr {Bábor} and Juan {Duarte} and František {Matějka}",
title="Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams",
booktitle="MicroMat 2000",
year="2000",
pages="4",
publisher="Editors: B. Michel, T. Winkler, M. Werner,H. Fecht",
address="Berlin"
}