Publication detail

Screen-printed nanoparticle tin oxide films for high-yield sensor systems

LLOBET, E. IVANOV, P. VILANOVA, X. BREZMES, J. HUBÁLEK, J. MALYSZ, K. GRACIA, I. CANÉ, C. CORREIG, X.

Czech title

Sítotiském tištěna nanočásticová vrsta oxidu ciničitého pro vysoce učinný senzorový system

English title

Screen-printed nanoparticle tin oxide films for high-yield sensor systems

Type

journal article - other

Language

en

Original abstract

By means of s screen-printing technique, sensitive layers of nanopowder tin oxide were deposited on silicon micromachined substrates. The thickness of the sensing layers was 5um and particle size was around 40nm. The deposition method overcomes disadvantages such as low porosity and low surface area, generally associated to chemical vapour deposition or sputtering methods, and keeps power consumption low(80mW for working temperature of 480C). With fuzzy neural network, it is posible to identify the different species measured (success rate was higher than 91%).

English abstract

By means of s screen-printing technique, sensitive layers of nanopowder tin oxide were deposited on silicon micromachined substrates. The thickness of the sensing layers was 5um and particle size was around 40nm. The deposition method overcomes disadvantages such as low porosity and low surface area, generally associated to chemical vapour deposition or sputtering methods, and keeps power consumption low(80mW for working temperature of 480C). With fuzzy neural network, it is posible to identify the different species measured (success rate was higher than 91%).

Keywords in English

Micromachined gas sensor; Screen-printing; Tin oxide; Nanopowder; Volatile organic compounds

RIV year

2003

Released

14.05.2003

ISSN

0925-4005

Journal

Sensors and Actuators B: Chemical

Volume

96

Number

1

Pages count

11

BIBTEX


@article{BUT41340,
  author="Eduard {Llobet} and Peter {Ivanov} and Xavier {Vilanova} and Jesús {Brezmes} and Jaromír {Hubálek} and Karel {Malysz} and I. {Gracia} and Carlas {Cané} and Xavier {Correig},
  title="Screen-printed nanoparticle tin oxide films for high-yield sensor systems",
  journal="Sensors and Actuators B: Chemical",
  year="2003",
  volume="96",
  number="1",
  month="May",
  issn="0925-4005"
}