Publication detail

Design of Piezoelectric Manipulators for an Application in SPM instruments

PÁTÍK, K. ŠIKOLA, T. LOPOUR, F.

English title

Design of Piezoelectric Manipulators for an Application in SPM instruments

Type

Paper in proceedings (conference paper)

Language

en

Original abstract

In this paper piezoelectric driven devices used for translation of the samples or other components both in atmospheric and UHV environments, especially in Scanning Probe Microscopy (SPM), are reported. The fundamental view of these actuators and a design of a compact micromanipulator for an AFM/STM unit are presented

Keywords in English

Design, Piezoelectric Manipulators, SPM instruments

Released

2001-11-15

Publisher

FEI VUT v Brně

Location

Brno

ISBN

80-214-1992-X

Book

Sborník příspěvků konference Nové trendy ve fyzice

Pages from–to

400–

Pages count

4

BIBTEX


@inproceedings{BUT6500,
  author="Karel {Pátík} and Tomáš {Šikola} and Filip {Lopour}",
  title="Design of Piezoelectric Manipulators for an Application in SPM instruments",
  booktitle="Sborník příspěvků konference Nové trendy ve fyzice",
  year="2001",
  pages="4",
  publisher="FEI VUT v Brně",
  address="Brno",
  isbn="80-214-1992-X"
}