Patent detail
Multilayer gettering structure for semiconductor device and method
LYSÁČEK, D. LORENC, M. VÁLEK, L.
English title
Multilayer gettering structure for semiconductor device and method
Type
Patent
Language
en
Original abstract
Multilayer gettering structure for semiconductor device and method
Keywords in English
Multilayer, gettering structures,
Date of registration
2010-06-15
Patent number
US Patent 7,737,004 B2
Patent owner
ON Semiconductor
BIBTEX
@misc{BUT72295,
author="David {Lysáček} and Michal {Lorenc} and Lukáš {Válek}",
title="Multilayer gettering structure for semiconductor device and method",
year="2010",
note="Patent"
}