Publication detail
Mechanical properties of Al thin film measured by two different methods
KUBĚNA, I. KRUML, T.
English title
Mechanical properties of Al thin film measured by two different methods
Type
Peer-reviewed article not indexed in WoS or Scopus
Language
en
Original abstract
Mechanical properties of an aluminium thin film were measured by microcompression and indentation tests. The microcompression technique combines preparation of specimens using focused ion beam (FIB) and compression test by a nanoindeter device. Cylindrical specimens were prepared by focused ion beam milling. The height of cylindrical specimens was about 2 mm and their diameter about 1,3 mm. The load and displacement were continuously measured during tests. The stress-strain curves were obtained in two representations. Stresses of the first plastic bursts were determined in both representations. Hardness and Young modulus were measured by indentation test using continuous stiffness method. Representative values of thin film were calculated.
Keywords in English
thin films, focused ion beam, aluminium, nanoindentation
Released
2011-11-01
ISSN
1335-1532
Volume
17
Number
3
Pages from–to
163–168
Pages count
6
BIBTEX
@article{BUT75370,
author="Ivo {Kuběna} and Tomáš {Kruml}",
title="Mechanical properties of Al thin film measured by two different methods",
journal="Acta Metallurgica Slovaca",
year="2011",
volume="17",
number="3",
pages="163--168",
issn="1335-1532"
}