Publication detail

Collection Solid Angle of Backscattered electrons in Environmental Scanning electron Microscopy.

WANDROL, P.

Czech title

Úhel sběru zpětně odražených elektronů v ESEM.

English title

Collection Solid Angle of Backscattered electrons in Environmental Scanning electron Microscopy.

Type

conference paper

Language

en

Original abstract

This paper deals with an influence of collection solid angle on a magnitude of detected signal. The presented results of measurement were gained by an observation of the specimen of carbon covered with a thin layer of gold. The collection solid angle was changed by application of aluminium masks mounted on scintillator. As a working environment in the specimen chamber were used air and saturated water steam.

Czech abstract

Práce se zabývá vlivem sběrového úhlu BSE na velikost detekovaného signálu. Prezentované výsledky měření byly získány zobrazováním uhlíkového vzorku pokrytého tenkou zlatou fólií. Sběrový úhel byl měněn použitím hliníkových clon připojených ke scintilátoru. Jako pracovní prostředí v komoře vzorku byl použit vzduch a nasycené vodní páry.

English abstract

This paper deals with an influence of collection solid angle on a magnitude of detected signal. The presented results of measurement were gained by an observation of the specimen of carbon covered with a thin layer of gold. The collection solid angle was changed by application of aluminium masks mounted on scintillator. As a working environment in the specimen chamber were used air and saturated water steam.

Keywords in English

Microscopy, electron, Backscattered, Environmental

Released

24.04.2003

Location

Brno

ISBN

80-214-2379-X

Book

Proceedings of 9th conference and competition Student EEICT 2003

Volume

Neuveden

Edition number

1

Pages count

5

BIBTEX


@inproceedings{BUT7820,
  author="Petr {Wandrol},
  title="Collection Solid Angle of Backscattered electrons in Environmental Scanning electron Microscopy.",
  booktitle="Proceedings of 9th conference and competition Student EEICT 2003",
  year="2003",
  volume="Neuveden",
  month="April",
  address="Brno",
  isbn="80-214-2379-X"
}