Publication detail

Calculation of the performance of magnetic lenses with limited machining precision

SHÁNĚL, O. ZLÁMAL, J. ORAL, M.

English title

Calculation of the performance of magnetic lenses with limited machining precision

Type

WoS Article

Language

en

Original abstract

To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.

Keywords in English

Tolerance analysis; Perturbed geometry; Spot size; Aberrations; Saturated magnetic lens

Released

2014-02-01

ISSN

0304-3991

Journal

Ultramicroscopy

Volume

137

Number

1

Pages from–to

1–6

Pages count

6

BIBTEX


@article{BUT103136,
  author="Ondřej {Sháněl} and Jakub {Zlámal} and Martin {Oral}",
  title="Calculation of the performance of magnetic lenses with limited machining precision",
  journal="Ultramicroscopy",
  year="2014",
  volume="137",
  number="1",
  pages="1--6",
  doi="10.1016/j.ultramic.2013.10.004",
  issn="0304-3991"
}