Detail publikace

Calculation of the performance of magnetic lenses with limited machining precision

SHÁNĚL, O. ZLÁMAL, J. ORAL, M.

Anglický název

Calculation of the performance of magnetic lenses with limited machining precision

Typ

Článek WoS

Jazyk

en

Originální abstrakt

To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.

Klíčová slova anglicky

Tolerance analysis; Perturbed geometry; Spot size; Aberrations; Saturated magnetic lens

Vydáno

2014-02-01

ISSN

0304-3991

Časopis

Ultramicroscopy

Ročník

137

Číslo

1

Strany od–do

1–6

Počet stran

6

BIBTEX


@article{BUT103136,
  author="Ondřej {Sháněl} and Jakub {Zlámal} and Martin {Oral}",
  title="Calculation of the performance of magnetic lenses with limited machining precision",
  journal="Ultramicroscopy",
  year="2014",
  volume="137",
  number="1",
  pages="1--6",
  doi="10.1016/j.ultramic.2013.10.004",
  issn="0304-3991"
}