Publication detail

Instrument for Thin Films Diagnostics by UV Spectroscopic Reflectometry

URBÁNEK, M. SPOUSTA, J. NAVRÁTIL, K. FIEDOR, M. CHMELÍK, R. BUČEK, M. ŠIKOLA, T.

English title

Instrument for Thin Films Diagnostics by UV Spectroscopic Reflectometry

Type

Paper in proceedings (conference paper)

Language

en

Original abstract

A system for large area thin film homognity diagnostics by spectroscopic reflectometry.

Released

2003-10-06

Publisher

ECASIA

Location

Berlin

Book

ECASIA '03 Book of abstracts

Pages from–to

284–

Pages count

1

BIBTEX


@inproceedings{BUT11095,
  author="Michal {Urbánek} and Jiří {Spousta} and Karel {Navrátil} and Marián {Fiedor} and Radim {Chmelík} and Miroslav {Buček} and Tomáš {Šikola}",
  title="Instrument for Thin Films Diagnostics by UV Spectroscopic Reflectometry",
  booktitle="ECASIA '03 Book of abstracts",
  year="2003",
  pages="1",
  publisher="ECASIA",
  address="Berlin"
}