Publication detail
In-situ analysis of PMPSI by spectroscopic ellipsometry and XPS
ČECHAL, J. TICHOPÁDEK, P. NEBOJSA, A. BONAVENTUROVÁ – ZRZAVECKÁ, O. URBÁNEK, M. NAVRÁTIL, K. ŠIKOLA, T.
English title
In-situ analysis of PMPSI by spectroscopic ellipsometry and XPS
Type
Paper in proceedings (conference paper)
Language
en
Original abstract
Degradation of PMPSi under temperature and UV light uder UHV conditions studied by XPS and spectroscopic ellipsometry.
Released
2003-10-06
Publisher
ECASIA
Location
Berlin
Book
ECASIA 10 Book of Abstracts
Pages from–to
226–
Pages count
1
BIBTEX
@inproceedings{BUT11096,
author="Jan {Čechal} and Petr {Tichopádek} and Alois {Nebojsa} and Olga {Bonaventurová - Zrzavecká} and Michal {Urbánek} and Karel {Navrátil} and Tomáš {Šikola}",
title="In-situ analysis of PMPSI by spectroscopic ellipsometry and XPS",
booktitle="ECASIA 10 Book of Abstracts",
year="2003",
pages="1",
publisher="ECASIA",
address="Berlin"
}