Publication detail

In-situ analysis of PMPSI by spectroscopic ellipsometry and XPS

ČECHAL, J. TICHOPÁDEK, P. NEBOJSA, A. BONAVENTUROVÁ – ZRZAVECKÁ, O. URBÁNEK, M. NAVRÁTIL, K. ŠIKOLA, T.

English title

In-situ analysis of PMPSI by spectroscopic ellipsometry and XPS

Type

Paper in proceedings (conference paper)

Language

en

Original abstract

Degradation of PMPSi under temperature and UV light uder UHV conditions studied by XPS and spectroscopic ellipsometry.

Released

2003-10-06

Publisher

ECASIA

Location

Berlin

Book

ECASIA 10 Book of Abstracts

Pages from–to

226–

Pages count

1

BIBTEX


@inproceedings{BUT11096,
  author="Jan {Čechal} and Petr {Tichopádek} and Alois {Nebojsa} and Olga {Bonaventurová - Zrzavecká} and Michal {Urbánek} and Karel {Navrátil} and Tomáš {Šikola}",
  title="In-situ analysis of PMPSI by spectroscopic ellipsometry and XPS",
  booktitle="ECASIA 10 Book of Abstracts",
  year="2003",
  pages="1",
  publisher="ECASIA",
  address="Berlin"
}