Publication detail

ACCURACY OF MEASUREMENT IN NANOMETROLOGY

ŠRÁMEK, J. JANKOVÝCH, R.

English title

ACCURACY OF MEASUREMENT IN NANOMETROLOGY

Type

Scopus Article

Language

en

Original abstract

The presented article focuses on measurements of extremely small dimensions in nanometrology using tactile probes. It addresses a newly developed method of precise measurements in nanometrology by touch probes, where the measurements are carried out on the machine SIOS NNM-1. The aim of this work is to determine accuracy of measurements on this machine.

Keywords in English

accuracy of measurement, length measurement, measurement repeatability, measurement reproducibility, measurement uncertainty, measuring device, nanometrology, ruby ball

Released

2016-11-30

Publisher

MM Science Journal

Location

ČR

ISSN

1805-0476

Journal

MM Science Journal

Volume

2016

Number

6

Pages from–to

1643–1647

Pages count

5

BIBTEX


@article{BUT131340,
  author="Jan {Šrámek} and Róbert {Jankových}",
  title="ACCURACY OF MEASUREMENT IN NANOMETROLOGY",
  journal="MM Science Journal",
  year="2016",
  volume="2016",
  number="6",
  pages="1643--1647",
  doi="10.17973/MMSJ.2016\{_}12\{_}2016203",
  issn="1803-1269",
  url="http://www.mmscience.eu/content/file/archives/MM_Science_2016203.pdf"
}