Detail publikace

ACCURACY OF MEASUREMENT IN NANOMETROLOGY

ŠRÁMEK, J. JANKOVÝCH, R.

Anglický název

ACCURACY OF MEASUREMENT IN NANOMETROLOGY

Typ

Článek Scopus

Jazyk

en

Originální abstrakt

The presented article focuses on measurements of extremely small dimensions in nanometrology using tactile probes. It addresses a newly developed method of precise measurements in nanometrology by touch probes, where the measurements are carried out on the machine SIOS NNM-1. The aim of this work is to determine accuracy of measurements on this machine.

Klíčová slova anglicky

accuracy of measurement, length measurement, measurement repeatability, measurement reproducibility, measurement uncertainty, measuring device, nanometrology, ruby ball

Vydáno

2016-11-30

Nakladatel

MM Science Journal

Místo

ČR

ISSN

1805-0476

Časopis

MM Science Journal

Ročník

2016

Číslo

6

Strany od–do

1643–1647

Počet stran

5

BIBTEX


@article{BUT131340,
  author="Jan {Šrámek} and Róbert {Jankových}",
  title="ACCURACY OF MEASUREMENT IN NANOMETROLOGY",
  journal="MM Science Journal",
  year="2016",
  volume="2016",
  number="6",
  pages="1643--1647",
  doi="10.17973/MMSJ.2016\{_}12\{_}2016203",
  issn="1803-1269",
  url="http://www.mmscience.eu/content/file/archives/MM_Science_2016203.pdf"
}