Publication detail

Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

OHLÍDAL, I. OHLÍDAL, M. KLAPETEK, P. ČUDEK, V. JÁKL, M.

English title

Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

Type

Paper in proceedings (conference paper)

Language

en

Original abstract

For applying this method the special experimental arrangement containing CCD camera as a detector is used. The spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large area of the substrates of the nonuniform films are found.

Keywords in English

Films nonuniform in optical parameters, optical characterization

Released

2003-09-01

Publisher

SPIE-The International Society for Optical Engineering

Location

Bellingham, Washington, USA

ISBN

0-8194-5055-3

ISSN

0277-786X

Book

Proceedings of SPIE

Journal

Proceedings of SPIE

Volume

Vol 5182

Pages from–to

260–271

Pages count

12

BIBTEX


@inproceedings{BUT14081,
  author="Ivan {Ohlídal} and Miloslav {Ohlídal} and Petr {Klapetek} and Vladimír {Čudek} and Miloš {Jákl}",
  title="Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry",
  booktitle="Proceedings of SPIE",
  year="2003",
  series="Wave-Optical Systems Engineering II",
  journal="Proceedings of SPIE",
  volume="Vol 5182",
  number="Vol 5182",
  pages="260--271",
  publisher="SPIE-The International Society for Optical Engineering",
  address="Bellingham, Washington, USA",
  isbn="0-8194-5055-3",
  issn="0277-786X"
}