Detail publikace
Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry
OHLÍDAL, I. OHLÍDAL, M. KLAPETEK, P. ČUDEK, V. JÁKL, M.
Anglický název
Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry
Typ
Stať ve sborníku v databázi WoS či Scopus
Jazyk
en
Originální abstrakt
For applying this method the special experimental arrangement containing CCD camera as a detector is used. The spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large area of the substrates of the nonuniform films are found.
Klíčová slova anglicky
Films nonuniform in optical parameters, optical characterization
Vydáno
2003-09-01
Nakladatel
SPIE-The International Society for Optical Engineering
Místo
Bellingham, Washington, USA
ISBN
0-8194-5055-3
ISSN
0277-786X
Kniha
Proceedings of SPIE
Časopis
Proceedings of SPIE
Ročník
Vol 5182
Strany od–do
260–271
Počet stran
12
BIBTEX
@inproceedings{BUT14081,
author="Ivan {Ohlídal} and Miloslav {Ohlídal} and Petr {Klapetek} and Vladimír {Čudek} and Miloš {Jákl}",
title="Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry",
booktitle="Proceedings of SPIE",
year="2003",
series="Wave-Optical Systems Engineering II",
journal="Proceedings of SPIE",
volume="Vol 5182",
number="Vol 5182",
pages="260--271",
publisher="SPIE-The International Society for Optical Engineering",
address="Bellingham, Washington, USA",
isbn="0-8194-5055-3",
issn="0277-786X"
}