Publication detail
Potentialities of optical profilometer MicroProf FRT for surface quality measurement
PÁLENÍKOVÁ, K. OHLÍDAL, M.
English title
Potentialities of optical profilometer MicroProf FRT for surface quality measurement
Type
Paper in proceedings (conference paper)
Language
en
Original abstract
Principle, parameters and selected applications of the optical profilometer MicroProf FRT are presented.
Keywords in English
Optical metrology, surface quality
Released
2005-07-01
Publisher
SPIE – The internationalSociety for Optical Engineering
Location
Bellingham, Washington, USA
ISBN
0-8194-5951-8
ISSN
0277-786X
Book
14 th Slovak-Czech Polish Conference on Wave and Quantum Aspects of Contemporary Optics
Journal
Proceedings of SPIE
Volume
5945
Pages from–to
59451O-1–59451O-6
Pages count
6