Publication detail
Comparison of AFM and optical methods at measuring nanometric surface roughness
OHLÍDAL, I. FRANTA, D. OHLÍDAL, M. VIČAR, M. KLAPETEK, P.
English title
Comparison of AFM and optical methods at measuring nanometric surface roughness
Type
Paper in proceedings (conference paper)
Language
en
Released
1998-11-01
Publisher
Physikalisch-Technische Bunesanstalt Ferrtiungsmestechnik
Location
Braunschweig, Germany
ISBN
3-89701-280-4
Book
PTB – Bericht F-34
Pages from–to
123–
Pages count
7
BIBTEX
@inproceedings{BUT21567,
author="Ivan {Ohlídal} and Daniel {Franta} and Miloslav {Ohlídal} and Miroslav {Vičar} and Petr {Klapetek}",
title="Comparison of AFM and optical methods at measuring nanometric surface roughness",
booktitle="PTB - Bericht F-34",
year="1998",
pages="7",
publisher="Physikalisch-Technische Bunesanstalt Ferrtiungsmestechnik",
address="Braunschweig, Germany",
isbn="3-89701-280-4"
}