Publication detail

Electron Beam Micromachining

DUPÁK, L. ZOBAČ, M.

English title

Electron Beam Micromachining

Type

Paper in proceedings (conference paper)

Language

en

Original abstract

The paper describes shows some results of electron beam micromachining done. The used device is derived from electron beam welding machine SES-1 developed at ISI Brno. Several types of materials as stainless steel, titanium, quartz glass, ceramics and some plastics were drilled. Typical shape of created holes is cone, which results in very small holes on the opposite side, especially in quartz glass (less than 10 microns in diameter, thickness of 0.7 mm).

Keywords in English

electron beam drilling; quartz glass

Released

2006-05-22

Publisher

Institute of Scientific Instruments AS CR and the Czechoslovak Microscopy Society

Location

Brno

ISBN

80-239-6285-X

Book

Proceedings of 10th seminar Recent Trends in Charged Particle Optics and Surface Physics Instruments

Pages from–to

15–

Pages count

2

BIBTEX


@inproceedings{BUT21748,
  author="Libor {Dupák} and Martin {Zobač}",
  title="Electron Beam Micromachining",
  booktitle="Proceedings of 10th seminar Recent Trends in Charged Particle Optics and Surface Physics Instruments",
  year="2006",
  series="NEU",
  number="NEUV",
  pages="2",
  publisher="Institute of Scientific Instruments AS CR and the Czechoslovak Microscopy Society",
  address="Brno",
  isbn="80-239-6285-X"
}