Detail publikace

Electron Beam Micromachining

DUPÁK, L. ZOBAČ, M.

Anglický název

Electron Beam Micromachining

Typ

Stať ve sborníku v databázi WoS či Scopus

Jazyk

en

Originální abstrakt

The paper describes shows some results of electron beam micromachining done. The used device is derived from electron beam welding machine SES-1 developed at ISI Brno. Several types of materials as stainless steel, titanium, quartz glass, ceramics and some plastics were drilled. Typical shape of created holes is cone, which results in very small holes on the opposite side, especially in quartz glass (less than 10 microns in diameter, thickness of 0.7 mm).

Klíčová slova anglicky

electron beam drilling; quartz glass

Vydáno

2006-05-22

Nakladatel

Institute of Scientific Instruments AS CR and the Czechoslovak Microscopy Society

Místo

Brno

ISBN

80-239-6285-X

Kniha

Proceedings of 10th seminar Recent Trends in Charged Particle Optics and Surface Physics Instruments

Strany od–do

15–

Počet stran

2

BIBTEX


@inproceedings{BUT21748,
  author="Libor {Dupák} and Martin {Zobač}",
  title="Electron Beam Micromachining",
  booktitle="Proceedings of 10th seminar Recent Trends in Charged Particle Optics and Surface Physics Instruments",
  year="2006",
  series="NEU",
  number="NEUV",
  pages="2",
  publisher="Institute of Scientific Instruments AS CR and the Czechoslovak Microscopy Society",
  address="Brno",
  isbn="80-239-6285-X"
}