Publication detail
Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography
PREZIOSO, S. LUCIANI, D. TUCCERI, P. deMARCO, P. GAUDIERI, A. KAISER, J. SANTUCCI, S. OTTAVIANO, L. ZUPPELLA, P.
English title
Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography
Type
Paper in proceedings (conference paper)
Language
en
Original abstract
Utilization of prototype low-cost tabletop soft X-ray laser (46.9 nm) as an Interference Nano-Litography tool is reported. The laser was developed in a frame of international cooperation at the University of LAquila, Italy. Interference Nano-Litography is one of the svereal applications this laser is used for.
Keywords in English
nano-litography, soft X-ray laser, Ar+8, 46.9 nm
Released
2009-09-01
Publisher
Task Publishing
Location
Gdansk, Poland
ISBN
978-83-908112-7-7
Book
Joint Conferences on Advanced Materials, 6th Workshop on Functional and Nanostructured Materials, 10th Conference on Intermolecular and Magnetic Interactions in Matter
Pages from–to
249–249
Pages count
1
BIBTEX
@inproceedings{BUT32646,
author="Jozef {Kaiser}",
title="Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography",
booktitle="Joint Conferences on Advanced Materials, 6th Workshop on Functional and Nanostructured Materials, 10th Conference on Intermolecular and Magnetic Interactions in Matter",
year="2009",
number="1",
pages="249--249",
publisher="Task Publishing",
address="Gdansk, Poland",
isbn="978-83-908112-7-7"
}