Detail publikace

Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography

PREZIOSO, S. LUCIANI, D. TUCCERI, P. deMARCO, P. GAUDIERI, A. KAISER, J. SANTUCCI, S. OTTAVIANO, L. ZUPPELLA, P.

Anglický název

Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography

Typ

Stať ve sborníku v databázi WoS či Scopus

Jazyk

en

Originální abstrakt

Utilization of prototype low-cost tabletop soft X-ray laser (46.9 nm) as an Interference Nano-Litography tool is reported. The laser was developed in a frame of international cooperation at the University of LAquila, Italy. Interference Nano-Litography is one of the svereal applications this laser is used for.

Klíčová slova anglicky

nano-litography, soft X-ray laser, Ar+8, 46.9 nm

Vydáno

2009-09-01

Nakladatel

Task Publishing

Místo

Gdansk, Poland

ISBN

978-83-908112-7-7

Kniha

Joint Conferences on Advanced Materials, 6th Workshop on Functional and Nanostructured Materials, 10th Conference on Intermolecular and Magnetic Interactions in Matter

Strany od–do

249–249

Počet stran

1

BIBTEX


@inproceedings{BUT32646,
  author="Jozef {Kaiser}",
  title="Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography",
  booktitle="Joint Conferences on Advanced Materials, 6th Workshop on Functional and Nanostructured Materials, 10th Conference on Intermolecular and Magnetic Interactions in Matter",
  year="2009",
  number="1",
  pages="249--249",
  publisher="Task Publishing",
  address="Gdansk, Poland",
  isbn="978-83-908112-7-7"
}