Publication detail

Usage of Segmental Ionization Detector at Environmental Conditions

AUTRATA, R. JIRÁK, J. SCHNEIDER, L.

Czech title

Použití segmentového ionizačního detektoru v environmentálních podmínkách

English title

Usage of Segmental Ionization Detector at Environmental Conditions

Type

journal article - other

Language

en

Original abstract

Environmental scanning electron microscope operates with the gaseous environment in the specimen chamber. This environment causes specific conditions for the detection of signal electrons. Classical Everhart-Thornley detector cannot be exploited for the detection of secondary electrons because of the impossibility to use high enough electric field in a gaseous environment to add sufficient energy to secondary electrons for efficient scintillation. Ionization detector is therefore used for the detection of signal electrons in environmental SEM most frequently.

Czech abstract

Environmentální rastrvací elektronový mikroskop umožňuje použití plynu v komoře vzorku. V daném případě nelze použít běžný Everhart-Thornley detektor, používá se ionizační detektor.

English abstract

Environmental scanning electron microscope operates with the gaseous environment in the specimen chamber. This environment causes specific conditions for the detection of signal electrons. Classical Everhart-Thornley detector cannot be exploited for the detection of secondary electrons because of the impossibility to use high enough electric field in a gaseous environment to add sufficient energy to secondary electrons for efficient scintillation. Ionization detector is therefore used for the detection of signal electrons in environmental SEM most frequently.

Keywords in English

ESEM, Ionization detector

Released

01.01.2003

Journal

Microscopy and Microanalysis

Volume

9

Number

3

Pages count

2

BIBTEX


@article{BUT41443,
  author="Rudolf {Autrata} and Josef {Jirák} and Luděk {Schneider},
  title="Usage of Segmental Ionization Detector at Environmental Conditions",
  journal="Microscopy and Microanalysis",
  year="2003",
  volume="9",
  number="3",
  month="January"
}