Použití segmentového ionizačního detektoru v environmentálních podmínkách

Usage of Segmental Ionization Detector at Environmental Conditions

článek v časopise - ostatní, Jost

en

Environmental scanning electron microscope operates with the gaseous environment in the specimen chamber. This environment causes specific conditions for the detection of signal electrons. Classical Everhart-Thornley detector cannot be exploited for the detection of secondary electrons because of the impossibility to use high enough electric field in a gaseous environment to add sufficient energy to secondary electrons for efficient scintillation. Ionization detector is therefore used for the detection of signal electrons in environmental SEM most frequently.

Environmentální rastrvací elektronový mikroskop umožňuje použití plynu v komoře vzorku. V daném případě nelze použít běžný Everhart-Thornley detektor, používá se ionizační detektor.

Environmental scanning electron microscope operates with the gaseous environment in the specimen chamber. This environment causes specific conditions for the detection of signal electrons. Classical Everhart-Thornley detector cannot be exploited for the detection of secondary electrons because of the impossibility to use high enough electric field in a gaseous environment to add sufficient energy to secondary electrons for efficient scintillation. Ionization detector is therefore used for the detection of signal electrons in environmental SEM most frequently.

ESEM, Ionization detector

01.01.2003

Microscopy and Microanalysis

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