Publication detail
Monitoring of surface homogeneity of optical parameters of thin films.
URBÁNEK, M. ŠIKOLA, T. NEBOJSA, A. SPOUSTA, J. DITTRICHOVÁ, L. CHMELÍK, R. ZLÁMAL, J. JIRUŠE, J.
English title
Monitoring of surface homogeneity of optical parameters of thin films.
Type
Paper in proceedings (conference paper)
Language
en
Original abstract
Monitoring of surface homogeneity of optical parameters of thin films
Released
2000-04-17
Publisher
Editors: B. Michel, T. Winkler, M. Werner,H. Fecht
Location
Berlin
Book
Micromat 2000
Pages from–to
604–
Pages count
6
BIBTEX
@inproceedings{BUT4155,
author="Michal {Urbánek} and Tomáš {Šikola} and Alois {Nebojsa} and Jiří {Spousta} and Libuše {Dittrichová} and Radim {Chmelík} and Jakub {Zlámal} and Jaroslav {Jiruše}",
title="Monitoring of surface homogeneity of optical parameters of thin films.",
booktitle="Micromat 2000",
year="2000",
pages="6",
publisher="Editors: B. Michel, T. Winkler, M. Werner,H. Fecht",
address="Berlin"
}