Publication detail

Deposition and in-situ charakterization of ultra-thin films

VOBORNÝ, S. KOLÍBAL, M. MACH, J. ČECHAL, J. BÁBOR, P. PRŮŠA, S. SPOUSTA, J. ŠIKOLA, T.

English title

Deposition and in-situ charakterization of ultra-thin films

Type

Peer-reviewed article not indexed in WoS or Scopus

Language

en

Original abstract

Paper deals with the deposition and in-situ charakterization of ultra-thin films

Keywords in English

Ion beam, deposition, XPS

Released

2004-01-01

ISSN

0040-6090

Journal

Thin Solid Films

Volume

459

Number

1-2

Pages from–to

17–

Pages count

5

BIBTEX


@article{BUT42360,
  author="Stanislav {Voborný} and Miroslav {Kolíbal} and Jindřich {Mach} and Jan {Čechal} and Petr {Bábor} and Stanislav {Průša} and Jiří {Spousta} and Tomáš {Šikola}",
  title="Deposition and in-situ charakterization of ultra-thin films",
  journal="Thin Solid Films",
  year="2004",
  volume="459",
  number="1-2",
  pages="5",
  issn="0040-6090"
}