Publication detail

In situ analysis of PMPSi by spectroscopic ellipsometry and XPS

ČECHAL, J. TICHOPÁDEK, P. NEBOJSA, A. BONAVENTUROVÁ, O. URBÁNEK, M. SPOUSTA, J. NAVRÁTIL, K. ŠIKOLA, T.

English title

In situ analysis of PMPSi by spectroscopic ellipsometry and XPS

Type

Peer-reviewed article not indexed in WoS or Scopus

Language

en

Original abstract

Paper deals with an in situ analysis of PMPSi by spectroscopic ellipsometry and XPS

Released

2004-01-01

ISSN

0142-2421

Journal

SURFACE AND INTERFACE ANALYSIS

Volume

38

Number

8

Pages from–to

1218–

Pages count

4

BIBTEX


@article{BUT42361,
  author="Jan {Čechal} and Petr {Tichopádek} and Alois {Nebojsa} and Olga {Bonaventurová} and Michal {Urbánek} and Jiří {Spousta} and Karel {Navrátil} and Tomáš {Šikola}",
  title="In situ analysis of PMPSi by spectroscopic ellipsometry and XPS",
  journal="SURFACE AND INTERFACE ANALYSIS",
  year="2004",
  volume="38",
  number="8",
  pages="4",
  issn="0142-2421"
}