Publication detail

Instrument for thin film diagnostics by UV spectroscopic reflectometry

URBÁNEK, M. SPOUSTA, J. NAVRÁTIL, K. SZOTKOWSKI, R. CHMELÍK, R. BUČEK, M. ŠIKOLA, T.

English title

Instrument for thin film diagnostics by UV spectroscopic reflectometry

Type

Peer-reviewed article not indexed in WoS or Scopus

Language

en

Original abstract

Paper presents an instrument for thin film diagnostics by UV spectroscopic reflectometry

Released

2004-01-01

ISSN

0142-2421

Journal

SURFACE AND INTERFACE ANALYSIS

Volume

36

Number

8

Pages from–to

1102–

Pages count

4

BIBTEX


@article{BUT42362,
  author="Michal {Urbánek} and Jiří {Spousta} and Karel {Navrátil} and Robert {Szotkowski} and Radim {Chmelík} and Miroslav {Buček} and Tomáš {Šikola}",
  title="Instrument for thin film diagnostics by UV spectroscopic reflectometry",
  journal="SURFACE AND INTERFACE ANALYSIS",
  year="2004",
  volume="36",
  number="8",
  pages="4",
  issn="0142-2421"
}