Publication detail

In situ analysis of PMPSi thin films by spectroscopic ellipsometry

BRANDEJSOVÁ, E. ČECHAL, J. BONAVENTUROVÁ, O. NEBOJSA, A. TICHOPÁDEK, P. URBÁNEK, M. NAVRÁTIL, K. ŠIKOLA, T. HUMLÍČEK, J.

English title

In situ analysis of PMPSi thin films by spectroscopic ellipsometry

Type

Peer-reviewed article not indexed in WoS or Scopus

Language

en

Original abstract

Paper deals with an in situ analysis of PMPSi thin films by spectroscopic ellipsometry

Released

2004-01-01

ISSN

0447-6441

Journal

Jemná mechanika a optika

Volume

9

Number

9

Pages from–to

260–

Pages count

3

BIBTEX


@article{BUT42364,
  author="Eva {Kolíbalová} and Jan {Čechal} and Olga {Bonaventurová} and Alois {Nebojsa} and Petr {Tichopádek} and Michal {Urbánek} and Karel {Navrátil} and Tomáš {Šikola} and Josef {Humlíček}",
  title="In situ analysis of PMPSi thin films by spectroscopic ellipsometry",
  journal="Jemná mechanika a optika",
  year="2004",
  volume="9",
  number="9",
  pages="3",
  issn="0447-6441"
}