Publication detail

The Trajectories of Secondary Electrons in the Scanning Electron Microscope.

KONVALINA, I. MÜLLEROVÁ, I.

English title

The Trajectories of Secondary Electrons in the Scanning Electron Microscope.

Type

Peer-reviewed article not indexed in WoS or Scopus

Language

en

Original abstract

Three-dimensional simulations of the trajectories of secondary electrons (SE) in the scanning electron microscope have been performed for plenty of real configurations of the specimen chamber, including all its basic components. The primary purpose was to evaluate the collection efficiency of the Everhart-Thornley detector of SE and to reveal fundamental rules for tailoring the set-ups in which efficient signal acquisition can be expected. Intuitive realizations about the easiness of attracting the SEs towards the biased front grid of the detector have shown themselves as likely false, and all grounded objects in the chamber have been proven to influence the spatial distribution of the signal-extracting field. The role of the magnetic field penetrating from inside the objective lens is shown to play an ambiguous role regarding possible support for the signal collection.

Keywords in English

ET detector, secondary electrons, collection efficiency

Released

2006-01-11

ISSN

0161-0457

Journal

SCANNING

Volume

28

Number

5

Pages from–to

245–

Pages count

12

BIBTEX


@article{BUT44381,
  author="Ivo {Konvalina}",
  title="The Trajectories of Secondary Electrons in the Scanning Electron Microscope.",
  journal="SCANNING",
  year="2006",
  volume="28",
  number="5",
  pages="12",
  issn="0161-0457"
}