Publication detail

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. NEČAS, D. BURŠÍKOVÁ, V.

English title

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

Type

WoS Article

Language

en

Original abstract

Complete optical characterization of diamond-like carbon films non-uniform in thickness is performed usig spectroscopic imaging reflectometry. It is shown that by using this technique it is possible to determine the distributions of the refractive index, extinction coefficient and thickness (with arbitrary shape of the thickness non-uniformity) of these films.

Keywords in English

spectroscopic imaging reflectometry, diamond-like carbon films, optical analysis

Released

2009-01-31

Publisher

Elsevier

Location

LAUSANNE

ISSN

0925-9635

Journal

DIAMOND AND RELATED MATERIALS

Volume

2009 (18)

Number

1

Pages from–to

384–387

Pages count

4

BIBTEX


@article{BUT48065,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and David {Nečas} and Vilma {Buršíková}",
  title="Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films",
  journal="DIAMOND AND RELATED MATERIALS",
  year="2009",
  volume="2009 (18)",
  number="1",
  pages="384--387",
  issn="0925-9635"
}