Detail publikace

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. NEČAS, D. BURŠÍKOVÁ, V.

Anglický název

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

Typ

Článek WoS

Jazyk

en

Originální abstrakt

Complete optical characterization of diamond-like carbon films non-uniform in thickness is performed usig spectroscopic imaging reflectometry. It is shown that by using this technique it is possible to determine the distributions of the refractive index, extinction coefficient and thickness (with arbitrary shape of the thickness non-uniformity) of these films.

Klíčová slova anglicky

spectroscopic imaging reflectometry, diamond-like carbon films, optical analysis

Vydáno

2009-01-31

Nakladatel

Elsevier

Místo

LAUSANNE

ISSN

0925-9635

Časopis

DIAMOND AND RELATED MATERIALS

Ročník

2009 (18)

Číslo

1

Strany od–do

384–387

Počet stran

4

BIBTEX


@article{BUT48065,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and David {Nečas} and Vilma {Buršíková}",
  title="Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films",
  journal="DIAMOND AND RELATED MATERIALS",
  year="2009",
  volume="2009 (18)",
  number="1",
  pages="384--387",
  issn="0925-9635"
}