Publication detail

Optical characterization of multilayer systems with randomly rough boundaries

OHLÍDAL, M. OHLÍDAL, I. VIŽĎA, F.

English title

Optical characterization of multilayer systems with randomly rough boundaries

Type

Paper in proceedings (conference paper)

Language

en

Original abstract

The method based on measuring and interpeting the spectral dependences of the coherent reflectance is used to determine the values of the optical and statistical parameters of three-layer and thirteen-layer systems exhibiting the randomly rough boundaries. The systems mentioned are formed by thin films of SiO2 and TiO2.

Keywords in English

multilayer systems, spectroscopic reflectometry

Released

1999-08-02

Publisher

SPIE- The international Society for Optical Engine

Location

San Francisco, California, USA

ISBN

0-8194-3234-2

Book

18th Congress of the International Commission for Optics: Optics for the Next Millennium

Pages from–to

150–151

Pages count

2

BIBTEX


@inproceedings{BUT485,
  author="Ivan {Ohlídal} and František {Vižďa} and Miloslav {Ohlídal}",
  title="Optical characterization of multilayer systems with randomly rough boundaries",
  booktitle="18th Congress of the International Commission for Optics: Optics for the Next Millennium",
  year="1999",
  series="1",
  pages="150--151",
  publisher="SPIE- The international Society for Optical Engine",
  address="San Francisco, California, USA",
  isbn="0-8194-3234-2"
}