Publication detail

Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation

BARTOŠÍK, M. KOLÍBAL, M. ČECHAL, J. MACH, J. ŠIKOLA, T.

English title

Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation

Type

Peer-reviewed article not indexed in WoS or Scopus

Language

en

Original abstract

We report on an alternative approach for the fabrication of metallic nanostructures: a selective growth on silicon substrates patterned by local anodic oxidation using atomic force microscopy. Our method represents a maskless, four-step process which combines a top-down and bottom-up approach. The dimensions of both the oxide lines and metallic elements can be controlled during the technological process. In this paper we demonstrate the preparation of gallium and cobalt structures on silicon substrates but this method can be extended to other combinations of metals and substrates enabling thus the fabrication of ordered nanostructures of various compositions and properties on locally oxidized surfaces.

Keywords in English

Selective growth; Local anodic oxidation; Gallium; Patterning

Released

2009-10-01

ISSN

1533-4880

Journal

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Volume

9

Number

10

Pages from–to

5887–5890

Pages count

4

BIBTEX


@article{BUT48787,
  author="Miroslav {Bartošík} and Miroslav {Kolíbal} and Jan {Čechal} and Jindřich {Mach} and Tomáš {Šikola}",
  title="Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation",
  journal="JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY",
  year="2009",
  volume="9",
  number="10",
  pages="5887--5890",
  issn="1533-4880"
}