Detail publikace

Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation

BARTOŠÍK, M. KOLÍBAL, M. ČECHAL, J. MACH, J. ŠIKOLA, T.

Anglický název

Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation

Typ

Článek recenzovaný mimo WoS a Scopus

Jazyk

en

Originální abstrakt

We report on an alternative approach for the fabrication of metallic nanostructures: a selective growth on silicon substrates patterned by local anodic oxidation using atomic force microscopy. Our method represents a maskless, four-step process which combines a top-down and bottom-up approach. The dimensions of both the oxide lines and metallic elements can be controlled during the technological process. In this paper we demonstrate the preparation of gallium and cobalt structures on silicon substrates but this method can be extended to other combinations of metals and substrates enabling thus the fabrication of ordered nanostructures of various compositions and properties on locally oxidized surfaces.

Klíčová slova anglicky

Selective growth; Local anodic oxidation; Gallium; Patterning

Vydáno

2009-10-01

ISSN

1533-4880

Časopis

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Ročník

9

Číslo

10

Strany od–do

5887–5890

Počet stran

4

BIBTEX


@article{BUT48787,
  author="Miroslav {Bartošík} and Miroslav {Kolíbal} and Jan {Čechal} and Jindřich {Mach} and Tomáš {Šikola}",
  title="Selective growth of metallic nanostructures on surfaces patterned by AFM local anodic oxidation",
  journal="JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY",
  year="2009",
  volume="9",
  number="10",
  pages="5887--5890",
  issn="1533-4880"
}