Publication detail

Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. FRANTA, D.

English title

Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films

Type

Abstract

Language

en

Original abstract

An novel efficient method enabling us to perform the complete optical analysis of diamond-like carbon thin films exhibiting area non-uniformity in optical parameters is presented.

Keywords in English

Optical instrumentation, DLC films, optical non-uniformity

Released

2008-05-26

Publisher

Academia Sinica, Taiwan

Location

Taipei

Pages from–to

422–422

Pages count

1

BIBTEX


@misc{BUT60755,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and Daniel {Franta}",
  title="Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films",
  year="2008",
  pages="422--422",
  publisher="Academia Sinica, Taiwan",
  address="Taipei",
  note="Abstract"
}