Detail publikace

Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. FRANTA, D.

Anglický název

Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films

Typ

Abstrakt

Jazyk

en

Originální abstrakt

An novel efficient method enabling us to perform the complete optical analysis of diamond-like carbon thin films exhibiting area non-uniformity in optical parameters is presented.

Klíčová slova anglicky

Optical instrumentation, DLC films, optical non-uniformity

Vydáno

2008-05-26

Nakladatel

Academia Sinica, Taiwan

Místo

Taipei

Strany od–do

422–422

Počet stran

1

BIBTEX


@misc{BUT60755,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and Daniel {Franta}",
  title="Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films",
  year="2008",
  pages="422--422",
  publisher="Academia Sinica, Taiwan",
  address="Taipei",
  note="Abstract"
}