Publication detail
Fabrication of nanostructures by AFM local Oxidation
LOPOUR, F. ŠIKOLA, T. ŠKODA, D.
English title
Fabrication of nanostructures by AFM local Oxidation
Type
Paper in proceedings (conference paper)
Language
en
Original abstract
In the paper AFM studies of microstructures etched by ion beams into Si and Au surfaces, and AFM local anodic oxidation of Ti thin films is presented. Using the AFM technique the etching limits of inert atoms in production of silicon and silver grids were found. It was proved that the height of Ti oxide lines fabricated by AFM increases linearly with the voltage between a tip and a sample. On the other hand, the half-width of the lines did not depend linearly on this voltage. The results are useful for studies of quantum effects in nanostructures and experiments in fabrication of nanoelectronic devices (e.g. SET).
Released
2001-11-15
Publisher
FEI VUT v Brně
Location
Brno
ISBN
80-214-1992-X
Book
Sborník příspěvků konference Nové trendy ve fyzice
Pages from–to
394–
Pages count
6
BIBTEX
@inproceedings{BUT6515,
author="Filip {Lopour} and Tomáš {Šikola} and David {Škoda}",
title="Fabrication of nanostructures by AFM local Oxidation",
booktitle="Sborník příspěvků konference Nové trendy ve fyzice",
year="2001",
pages="6",
publisher="FEI VUT v Brně",
address="Brno",
isbn="80-214-1992-X"
}