Detail publikace

Fabrication of nanostructures by AFM local Oxidation

LOPOUR, F. ŠIKOLA, T. ŠKODA, D.

Anglický název

Fabrication of nanostructures by AFM local Oxidation

Typ

Stať ve sborníku v databázi WoS či Scopus

Jazyk

en

Originální abstrakt

In the paper AFM studies of microstructures etched by ion beams into Si and Au surfaces, and AFM local anodic oxidation of Ti thin films is presented. Using the AFM technique the etching limits of inert atoms in production of silicon and silver grids were found. It was proved that the height of Ti oxide lines fabricated by AFM increases linearly with the voltage between a tip and a sample. On the other hand, the half-width of the lines did not depend linearly on this voltage. The results are useful for studies of quantum effects in nanostructures and experiments in fabrication of nanoelectronic devices (e.g. SET).

Vydáno

2001-11-15

Nakladatel

FEI VUT v Brně

Místo

Brno

ISBN

80-214-1992-X

Kniha

Sborník příspěvků konference Nové trendy ve fyzice

Strany od–do

394–

Počet stran

6

BIBTEX


@inproceedings{BUT6515,
  author="Filip {Lopour} and Tomáš {Šikola} and David {Škoda}",
  title="Fabrication of nanostructures by AFM local Oxidation",
  booktitle="Sborník příspěvků konference Nové trendy ve fyzice",
  year="2001",
  pages="6",
  publisher="FEI VUT v Brně",
  address="Brno",
  isbn="80-214-1992-X"
}