Publication detail

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

NEDĚLA, V. KONVALINA, I. LENCOVÁ, B. ZLÁMAL, J.

English title

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

Type

Peer-reviewed article not indexed in WoS or Scopus

Language

en

Original abstract

This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.

Keywords in English

Electron-gas interactions; Monte Carlo simulations; Signal amplification; Analytical models

Released

2011-07-21

ISSN

0168-9002

Journal

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT

Volume

645

Number

1

Pages from–to

79–83

Pages count

5

BIBTEX


@article{BUT72697,
  author="Vilém {Neděla} and Ivo {Konvalina} and Bohumila {Lencová} and Jakub {Zlámal}",
  title="Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM",
  journal="NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT",
  year="2011",
  volume="645",
  number="1",
  pages="79--83",
  issn="0168-9002"
}