Detail publikace

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

NEDĚLA, V. KONVALINA, I. LENCOVÁ, B. ZLÁMAL, J.

Anglický název

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

Typ

Článek recenzovaný mimo WoS a Scopus

Jazyk

en

Originální abstrakt

This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.

Klíčová slova anglicky

Electron-gas interactions; Monte Carlo simulations; Signal amplification; Analytical models

Vydáno

2011-07-21

ISSN

0168-9002

Časopis

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT

Ročník

645

Číslo

1

Strany od–do

79–83

Počet stran

5

BIBTEX


@article{BUT72697,
  author="Vilém {Neděla} and Ivo {Konvalina} and Bohumila {Lencová} and Jakub {Zlámal}",
  title="Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM",
  journal="NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT",
  year="2011",
  volume="645",
  number="1",
  pages="79--83",
  issn="0168-9002"
}