Publication detail
Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing
VÁLEK, L. ŠIK, J.
English title
Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing
Type
Chapter in a book
Language
en
Original abstract
The chapter on the growth of single crystals of Czochralski silicon and formation and control of crystal defects in silicon. The book deals with bulk crystal growth and thin film preparation.
Keywords in English
silicon; single crystal; defects
Released
2012-01-13
Publisher
INTECH
Location
Rieka, Croatia
ISBN
978-953-307-610-2
Book
Modern Aspects of Bulk Crystal and Thin Film Preparation
Pages from–to
43–70
Pages count
28
BIBTEX
@inbook{BUT89045,
author="Lukáš {Válek} and Jan {Šik}",
title="Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing",
booktitle="Modern Aspects of Bulk Crystal and Thin Film Preparation",
year="2012",
publisher="INTECH",
address="Rieka, Croatia",
series="1",
edition="1",
pages="43--70",
isbn="978-953-307-610-2"
}