Detail publikace

Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

VÁLEK, L. ŠIK, J.

Anglický název

Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

Typ

Kapitola, resp. kapitoly v odborné knize

Jazyk

en

Originální abstrakt

The chapter on the growth of single crystals of Czochralski silicon and formation and control of crystal defects in silicon. The book deals with bulk crystal growth and thin film preparation.

Klíčová slova anglicky

silicon; single crystal; defects

Vydáno

2012-01-13

Nakladatel

INTECH

Místo

Rieka, Croatia

ISBN

978-953-307-610-2

Kniha

Modern Aspects of Bulk Crystal and Thin Film Preparation

Strany od–do

43–70

Počet stran

28

BIBTEX


@inbook{BUT89045,
  author="Lukáš {Válek} and Jan {Šik}",
  title="Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing",
  booktitle="Modern Aspects of Bulk Crystal and Thin Film Preparation",
  year="2012",
  publisher="INTECH",
  address="Rieka, Croatia",
  series="1",
  edition="1",
  pages="43--70",
  isbn="978-953-307-610-2"
}